STRUCTURAL FEATURES AND MORPHOLOGY OF THIN FILMS OF MANGANESE SILICIDES OBTAINED BY ION IMPLANTATION AND THERMAL ANNEALING. American Journal of Technology and Applied Sciences, [S. l.], v. 45, p. 33–43, 2026. Disponível em: https://americanjournal.org/index.php/ajtas/article/view/3398. Acesso em: 16 apr. 2026.